plasmareactor (Schematic of a planar plasma etcher)

Other Plasma Gases Available

A variety of other gases can be used to customize the surface modification function of the plasma. Many of the these gases can be used with the Blue Lantern products. Please Contact Us for more information about alternative gases and applications.

Oxygen (O2):

Air:

Argon (Ar):

H2O:

CF4:

CF4+4%O2:

SF6:

C2F6:

Many others: